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Tip-Tilt-Piston MEMS Mirrors for Adaptive
Optics (AO) and Spatial Light Modulators (SLMs) |
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advances in ARIMEMS fabrication technology and the recently demonstrated
gimbal-less 2D scanners at ARI have opened up the possibility
of developing large phased optical arrays with miniature micromirror
elements capable of tip-tilt-piston actuation. Such actuators
have been scaled down to 1mm x 1mm size, 0.8mm x 0.8mm, 0.6mm
x 0.6mm, and most recently as small as 0.4mm x 0.4mm. Variety
of designs have been fabricated and tested and design techniques
are being developed to optimize such devices such that maximum
available power density is extracted from each such small element
to achieve the very difficult specifications of large arrays of
elements, each capable of reconfiguring |
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Video: Demonstration of a Tip-Tilt-Piston MEMS Mirror Array (New!) |
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More video demonstrations of the MEMS 2D Micromirrors can be downloaded and viewed here(New!) |
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| SEM
micrograph of a new tip/tilt two-axis scanner actuator
with additional piston (vertical only) control. Four
vertical combdrive bi-directional rotators are arranged
around a center stage where a 0.8mm x 0.8mm mirror is
bonded fully covering the actuator. Such elements can
then be spaced closely for high fill factor arrays.
In this test-structure, larger pads are used for easier
testing of fully fabricated devices.
Testing
to date has shown -14 to 14 deg. of optical scanning
up to ~ 10.2 kHz for both axes without the bonded thin
mirror (as shown) |
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SEM
micrograph of another new type of tip/tilt two-axis
scanner actuator. Four vertical combdrive rotators are
arranged around a center stage where a 0.6mm x 0.6mm
mirror is bonded fully covering the actuator. An arrangement
of two-degree-of-freedom linkages is used to connecto
to the center stage, different than in the device above.
Such elements can then be spaced closely for high fill
factor arrays. In this test-structure, larger pads are
used for easier testing of fully fabricated devices.
Testing
to date has shown 0 to 16 deg. of optical scanning up
to ~ 9.7 kHz for both axes without the bonded thin mirror
(as shown)
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| SEM
micrograph of a part of the array of the smallest tip/tilt
two-axis scanner actuators in our project to date. Four
vertical combdrive rotators are arranged around a center
stage where a 0.4mm x 0.4mm mirror is bonded fully covering
the actuator. In this SEM, only actuators are shown,
without the bonded thin mirror plates on top.
An arrangement of two-degree-of-freedom linkages is
used to connecto to the center stage.
Testing
to date has shown -5 to 5 deg. of optical for both axes
scanning up to ~ 83 kHz rotation for both axes and up
to ~78 kHz pistoning without the bonded thin mirror
(as shown)
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