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CMOS Post-processing
for a Variety of Sensor and Actuator Applications |
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| CMOS
technology is now more frequently used in non-conventional
applications such as imaging, magnetic sensors, etc.
In collab. with researchers at NIST and GWU, ARI researchers
have developed a variety of sensors and actuators by
post-processing micromachining of CMOS ICs. The new
methodology also allows the integration of a variety
of passive microwave components into CMOS. Using these
structures, it is our goal to develop miniature, integrated
microwave sensor systems, and provide wireless communication
capability for a variety of other sensors. |
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Photo
of a fabricated 0-50 GHz
thermoelectric power sensor in CMOS. |
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| Microphotograph
of a CMOS chip with two 1D thermal-
convective accelerometers and supporting circuits -
1998 |
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| Microphotograph
of suspended RF inductor with Q~20 at 2.4 GHz |
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Adriatic Research Institute
is seeking commercial partners for further development,
licensing, and commercialization of the technology. |
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| N.
H. Tea et al., "Hybrid Postprocessing Etching for CMOS Compatible
MEMS," Journal of MicroElectroMechanical Systems, 6 (4), 363-372,
December 1997. |
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| V.
Milanovic, et al "Convective Accelerometer and Tilt Sensor in
CMOS Technology," Applied Physics Letters, vol. 76, no. 2, Jan.
2000. |
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