|
Optical Beam Steering
Mirrors for Optical Switches and Projection Technologies |
| |
|
Prototype/demonstration 2D micromirror scanner devices are now available for purchase |
| |
|
Video demonstrations of the MEMS 2D Laser Scanners can be downloaded and viewed here(New!) |
|
Video demonstration of a Tip-Tilt-Piston MEMS Mirror Array can be viewed here(New!) |
| |
| |
|
ARI Micromirror Description (pdf) (New!) |
| |
|
B Series Gimbal-less Two-Axis Devices -Specifications (pdf) (New!) |
|
L Series Gimbal-less Two-Axis Devices - Specifications (pdf) (New!) |
|
M Series Gimbal-less Two-Axis Devices - Specifications (pdf) (New!) |
| |
| |
|
ARI has developed new types of torsional micromirror
design for optical beam steering in switching and projection
applications. This new technology, fabricated
using deep-trench etching of silicon, features 2 degrees
of freedom with position sensing. For best repeatability
and reliability, we fabricate fully monolithic silicon
microstructures, with no bonding or deposited structural
materials. 400 p-to-p of static optical
deflection have been demonstrated. This new micromirror
design includes all of the necessary features for optical
switching applications, automotive display and collision
avoidance applications, including a low switching time,
high reliability, and batch fabrication for low cost. |
 |
| |
|
|  |
The methodology of lateral actuation for beam-steering
micromirrors was first developed by Prof. Pister at
the Berkeley Sensor and Actuator Center. |
| |
|
|  |
Adriatic Research Institute is seeking commercial partners
for further development, licensing, and commercialization
of the devices. |
| |
|
|
| |
| V.
Milanovic, S. Kwon, L. P. Lee,”High Aspect Ratio Micromirror with
Independent Tilt and Piston Actuation,” submitted to Photonics
and Technology Letters, May 2002. |
| |
| V.
Milanovic, M. Last, K. Pister, “Torsional Micromirrors with Lateral
Actuators,” Transducers’01 Symposium, Muenchen, Germany, June
2001. |
