Research Projects at ARI

     New Videos  
 
             
 
Conference and Journal Publications
 

ARIMEMS Optical Scanners Demonstration Devices (New!)
 

MEMS 2D Optical Scanners Video Demonstrations (New!)
 
Optical MEMS (MOEMS)
MEMS for Adaptive Optics (AO) and Spatial Lights Modulators (SLMs)  
Two-axis (2D) MEMS Optical Scanners  
Laterally Actuated Torsional Micromirrors  
Microoptics with Independent Tilting and Pistoning  
Multilevel Beam SOI-MEMS for Optical Applications  
   
 
Biomedical Technology
Capacitive Biosensors for Detection of Surface Binding and Biomolecular Modifications  
   
 
Vacuum Microelectronics
Microelectromechanical Field Emission Devices (MEMFEDs)  
   
   
Nanotechnology  
Silicon Nanowires for Electronic and Thermoelectric Applications  
   
   
RF MEMS  
RF / Microwave Microrelays  
Wafer Transfer of MEMS for RF Applications  
   
   
CMOS MEMS  
CMOS Post-processing for Sensor&Actuator Applications MEMS  
   
   
Other Projects  
Other research topics  
Other research images  
   
                 
                 
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