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Microrelays for
Applications from 0 GHz to 50 GHz |
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Simple electrostatic pull-down
bridges – series and shunt types |
- 0.03
dB at 2.4 GHz
- <0.1 dB at 20 GHz
- <0.25 dB 0-50GHz
- Iso. >20dB 0-50GHz
- Switching voltages 20-50 Volts
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Electrostatic see-saw
actuation – series and shunt types |
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- Lower
actuation voltages (<20V)
- Increased lifetime, better reliability
against stiction
- Better hot-switching performance
– one side always electrostatically “latched”
- Increased isolation >40dB 0-50GHz
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| V.
Milanovic, “RF MEMS Switch Development and Packaging Using a Wafer
Transfer Process,” invited talk, MEMS Workshop, Int. Microwave
Symp., Phoenix, AZ, May 2001. |
| |
| V.
Milanovic, M. Maharbiz, A. Singh, B. Warneke, N. Zhou, H. K. Chan,
and K. Pister, ``Microrelays for Batch Transfer Integration in
RF Systems,'' International Conference on Microelectromechanical
Systems (MEMS 2000), Japan, Jan. 2000. |
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