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Microoptics with
Independent Tilting and Pistoning |
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Based on the advances in ARIMEMS
fabrication technology which allow independently controlled
vertical combdrive sets, new degrees of freedom have been added
to traditional SOI-MEMS elements: both upward and downward vertical
pistoning motion as well as bi-directional rotation. Our methodology
enables fabrication of fully isolated and accurately self-aligned
vertical combdrive sets in the SOI device layer, with initial
combfinger overlap. A micromirror with bi-directional static rotation
from –11 to 16 optical degrees, and with bi-directional pistoning
motion from –8 µm to 8 µm, in all cases at <60
Vdc is shown below. |
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| V.
Milanovic, S. Kwon, L. P. Lee,”High Aspect Ratio Micromirror with
Independent Tilt and Piston Actuation,” submitted to Photonics
and Technology Letters, May 2002. |
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| V.
Milanovic, M. Last, K. Pister, “Torsional Micromirrors with Lateral
Actuators,” Transducers’01 Symposium, Muenchen, Germany, June
2001. |
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