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Multilevel Beam
SOI-MEMS for Optical Applications |
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Prototype/demonstration 2D micromirror scanner devices are now available for purchase |
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Video demonstrations of the MEMS 2D Laser Scanners can be downloaded and viewed here(New!) |
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Video demonstration of a Tip-Tilt-Piston MEMS Mirror Array can be viewed here(New!) |
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ARI Micromirror Description (pdf) (New!) |
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B Series Gimbal-less Two-Axis Devices -Specifications (pdf) (New!) |
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L Series Gimbal-less Two-Axis Devices - Specifications (pdf) (New!) |
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M Series Gimbal-less Two-Axis Devices - Specifications (pdf) (New!) |
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| ARI
has developed a new methodology for the micromachining of high
aspect ratio single-crystal Silicon (SCS) beams at different vertical
levels within a monolithic piece of SCS in an SOI wafer. This
provides for conversion of lateral motion to vertical motion and
to rotation, provides for vertical comb-drive implementation,
and many other possibilities in addition to all the benefits of
high aspect ratio SOI MEMS. With the added degrees of freedom
for SOI MEMS, a new class of high-performance MEMS is possible. |
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methodology enables fabrication of fully isolated and accurately
self-aligned vertical combdrive sets in the SOI device layer,
with initial comb finger overlap. |
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SEM of
vertical comb-drive showing self-aligned fingers |
SEM
of various beams in micro-mirror appl. |
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V. Milanovic, “Multilevel Beam SOI-MEMS
for Optical Applications,” invited paper, to be presented at ICECS’2002,
Dubrovnik, Croatia, Sep. 2002. |
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V. Milanovic, M. Last, K. Pister,
“Torsional Micromirrors with Lateral Actuators,” Transducers’01
Symposium, Muenchen, Germany, June 2001. |
